发明名称 |
SOLID-STATE INERTIAL SENSOR ON CHIP |
摘要 |
Monolithic solid-state inertial sensor. The sensor detects rotation rate about three orthogonal axes and includes a micromachined monolithic piezoelectric crystalline structure including an equal number of vibratory drive and detection tines on each side of an axis of symmetry of the sensor, the tines being synchronized to have alternate actuation movements inward and outward. |
申请公布号 |
CA2733940(A1) |
申请公布日期 |
2010.02.18 |
申请号 |
CA20092733940 |
申请日期 |
2009.02.04 |
申请人 |
SURAL |
发明人 |
DUBE, GASTON;RIVIERE, ALFREDO |
分类号 |
G01P15/09 |
主分类号 |
G01P15/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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