BEAM SCANNING CHROMATIC CONFOCAL MICROSCOPY

摘要

PURPOSE: A beam scanning chromatic confocal microscope is provided to reduce measurement time since one measurement of any point on X-Y plane is sufficient while minimizing the movement of a measure system. CONSTITUTION: An optical source unit(1) emits a white light or a light in which lights with a plurality of wavelengths are mixed. The collimating lens(3) induces the light coming out from the optical source unit to be parallel with the collimating lens. A beam splitter(5A) divides the collimated light passing through the collimating lens. A scanning system(9) comprises a plurality of mirrors and a driving part rotating the mirrors. The scanning system adjusts the progressive direction of the light passing through the beam splitter and moves the light projected on the specimen in parallel with the plane in which the specimen is placed. An objective lens(12) guides the light passing through the scanning system to the specimen.