| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern forming method capable of preventing short circuiting failure or the like between patterns, and capable of forming easily a highly reliable and highly precise pattern at low cost, and a photosensitive composition suitable for the pattern forming method. <P>SOLUTION: This pattern forming method forms a coating film of the photosensitive composition on a substrate, exposes and develops the coating film, to be formed into the pattern, deposits inorganic powder on the obtained pattern, and burns it. <P>COPYRIGHT: (C)2010,JPO&INPIT |
