发明名称 FILM FORMING MATERIAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a film forming material (vapor deposition material), for forming a protective layer of an excellent plasma display panel, to achieve the plasma display panel for displaying an excellent image. Ž<P>SOLUTION: Disclosed is the film deposition material 202 which is fed to a film forming apparatus through a chute (material supply passage), and constituted of a mixture of a film forming material of a hexahedron shape and a film forming material of other shape. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010037610(A) 申请公布日期 2010.02.18
申请号 JP20080202815 申请日期 2008.08.06
申请人 PANASONIC CORP 发明人 MIZOGAMI KANAME;IMANAKA SEIJI;OE YOSHIHISA
分类号 C23C14/24;H01J9/02;H01J11/02;H01J11/22;H01J11/34;H01J11/40 主分类号 C23C14/24
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