| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment liquid cleaning apparatus which can easily clean a treatment liquid and can easily realize energy saving. SOLUTION: The treatment liquid cleaning apparatus comprises a cylindrical treatment liquid tank 1 with closed-end that stores a sludge-containing treatment liquid, a separating mechanism 3 that removes sludge from the treatment liquid, and a circulation mechanism 4 for separation that supplies the treatment liquid stored in the treatment liquid tank 1 to the separation mechanism 3 and returns the treatment liquid discharged from the separation mechanism 3 to the treatment liquid tank 1. In the treatment liquid tank 1, a vortex is formed around the center of the treatment liquid tank 1 by the treatment liquid returned from the circulation mechanism 4 for separation. The circulation mechanism 4 for separation comprises a suction part 6 that sucks the treatment liquid located on the center part in the treatment liquid tank 1 and supplies the treatment liquid to the separation mechanism 3, and a pulsing motion generating means 5 that causes pulsation in the treatment liquid sucked by the suction part 6. COPYRIGHT: (C)2010,JPO&INPIT
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