| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus that uses a solid raw material and that can replenish a tank for raw material supply with a raw material without detaching the tank for raw material supply from an apparatus, and to provide a raw material replenishment method. Ž<P>SOLUTION: The substrate processing apparatus is provided with a first raw material container 270 which holds the solid raw material, a second raw material container 260 connected to the first raw material container through first piping and replenished with the solid raw material, second piping 230 connecting the second raw material container and a processing chamber to each other, a heating means 283 capable of heating at least the first raw material container and first piping, and a pressure adjusting means capable of adjusting the pressure in at least the first raw material container and second raw material container, wherein the apparatus controls the heating means and pressure adjusting means to transform the solid raw material into a gas raw material before the replenishment when supplying the solid raw material from the first raw material container to the second raw material container. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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