MEMS FILTER MODULE WITH CONCENTRIC FILTERING WALLS

摘要

A bidirectional flow MEMS filter module ( 40 ) is disclosed that uses a plurality of concentrically disposed filtering walls ( 60 ). The MEMS filter module ( 40 ) includes a first plate ( 44 ) having a plurality of first flow ports ( 48 ), as well as a second plate ( 52 ) having a plurality of second flow ports ( 56 ) that is spaced from and interconnected with the first plate ( 44 ). The above-noted filtering walls ( 60 ) extend from the second plate ( 52 ) at least toward the first plate ( 44 ). The first plate ( 44 ) and each filtering wall ( 60 ) are spaced from each other to define a filter trap ( 64 ). All flow through the MEMS filter module ( 40 ) must pass through at least one filter trap ( 64 ) prior to exiting the MEMS filter module ( 40 ), either through one or more of the first flow ports ( 48 ) or through one or more of the second flow ports ( 56 ).