| 发明名称 |
TURBOMOLECULAR PUMP |
| 摘要 |
<p>A turbomolecular pump (12) has a circular intake opening (16) distal of an inlet rotor stage (18). The intake opening (16) comprises at least two opening sections (41, 42, 43) that are separated from each other.</p> |
| 申请公布号 |
EP2153070(A1) |
申请公布日期 |
2010.02.17 |
| 申请号 |
EP20080760568 |
申请日期 |
2008.06.05 |
| 申请人 |
OERLIKON LEYBOLD VACUUM GMBH |
发明人 |
SCHNEIDERS, ROBERT;HENRY, MARKUS;WALTER, GERHARD WILHELM |
| 分类号 |
F04D19/04;F04D29/70;H01J49/26 |
主分类号 |
F04D19/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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