发明名称 Method and apparatus for cathodic arc deposition
摘要 A method for applying a coating by a cathodic arc is provided. The method includes the steps of: a) providing a cathodic arc coater that includes a power source and utilizes a disk-shaped cathode, the cathode having an evaporative surface extending between a first end surface and a second end surface, wherein the evaporative surface has an area; b) determining a maximum acceptable power density for the evaporative surface; and c) applying a magnitude of electrical current from the power source to the cathode, wherein the electrical current magnitude divided by the area is equal to or less than the maximum acceptable power density for the evaporative surface.
申请公布号 EP1683888(A3) 申请公布日期 2010.02.17
申请号 EP20050257348 申请日期 2005.11.29
申请人 UNITED TECHNOLOGIES CORPORATION 发明人 BEERS, RUSSELL A.;KASULE, ASUMINI;COLLINS, KEVIN LEE
分类号 C23C14/32;H01J37/32 主分类号 C23C14/32
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