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发明名称
摘要
申请公布号
JP4415449(B2)
申请公布日期
2010.02.17
申请号
JP20000123598
申请日期
2000.04.25
申请人
发明人
分类号
C23C22/06;C23F15/00;C23F11/04
主分类号
C23C22/06
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