SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE OF THE SAME

摘要

PURPOSE: An apparatus which processes a substrate and a substrate transferring method of the same are provided to reduce transfer time and improve productivity by controlling transfer arms which operate simultaneously to reach a target. CONSTITUTION: An apparatus which processes a substrate(1000) includes a transfer unit(200) which draws a substrate from a receiving unit and loads the substrate and a control unit(710,720) controlling the transfer unit. The transfer unit includes a plurality of transfer arms on which the substrate is loaded and an arm driving unit which transfers each transfer arm transversely. The control unit controls the transfer speed and location of the transfer unit. Each transfer speed profile of the transfer arms is compared and the transfer speed of each transfer arm is controlled. Accordingly, transfer arms are driven simultaneously to reach the target at the same time.