| 摘要 |
A rotary floater (30) for supporting a treatment object (W) is floated by the magnetic attraction of a floating electromagnet assembly (F), and the rotary floater (30) is rotated by the magnetic attraction of a rotary electromagnet assembly (R) while its horizontal position being controlled by the magnetic attraction of a positioning electromagnet assembly (H). The floating electromagnet assembly (F) causes the magnetic attraction to act vertically downward, so that the rotary floater (30) is floated and suspended without contact from the inner wall of a treating container (2). |
