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发明名称
摘要
申请公布号
FR2018987(A1)
申请公布日期
1970.06.26
申请号
FR19690028460
申请日期
1969.08.19
申请人
IBM
发明人
分类号
C30B23/02;C23C14/06;C30B25/02;C30B29/48;H01L21/365;(IPC1-7):B01J17/00
主分类号
C30B23/02
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