METHOD AND APPARATUS OF MANUFACTURING A TARGET USING LASER DEVICE

摘要

PURPOSE: A method and an apparatus for a laser process are provided to form a fine pattern by producing a beam spot with an identical width and length corresponding to the processing area of a target. CONSTITUTION: A first laser beam(41) with a first beam spot is produced. The first laser beam is transformed into a second laser beam(43) with a second beam spot(43a) of which a width is varied from the width of the first beam spot. The second laser beam is transformed into a third laser beam(45) with a third beam spot(45a) of which a length is varied from the second beam spot. The width and length of the third beam spot are correspondingly varied to the processing area of the target. The processing of the target using the third laser beam with the third beam spot includes a cutting or scribing process.