Method for raising chamber temeprature and heating apparatus thereof,申请号KR20070137253-传众专利搜索

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发明名称	Method for raising chamber temeprature and heating apparatus thereof
摘要
申请公布号	KR100942623(B1)	申请公布日期	2010.02.17
申请号	KR20070137253	申请日期	2007.12.26
申请人		发明人
分类号	H01L21/324	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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