ORIGINAL DATA GENERATION PROGRAM, ORIGINAL DATA GENERATION METHOD, ORIGINAL GENERATION METHOD, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a program and a method capable of calculating original data in a smaller calculation amount so as to form an intended pattern on a substrate with high accuracy.

SOLUTION: The program allows a computer to execute the following steps to calculate data of an original. The steps are: setting an intended pattern to be formed on a substrate; converting data regarding the intended pattern into frequency-domain data; calculating a two-dimensional transmission cross coefficient by using a function representing an effective light source that an illumination device forms on a pupil plane of a projection optical system when the original is absent on an object plane of the projection optical system and by using a pupil function of the projection optical system; calculating a diffracted light distribution from a pattern that is supposed to be present on the object plane, by using both of the frequency-domain data and the data of at least one component of the calculated two-dimensional transmission cross coefficient; and converting the data of the calculated diffracted light distribution into spatial-domain data to determine the data of the original.

COPYRIGHT: (C)2010,JPO&INPIT