发明名称 LEVITATION DEVICE AND LEVITATION TRANSPORTATION DEVICE
摘要 <p>A levitation transportation device for transporting an object having a lower surface while levitating it by fluid. The levitation transportation device has a levitation device, a fluid supply device, and a transportation device. The levitation device includes a base having a flat upper surface and also includes a nozzle formed to have its opening in the upper surface. The nozzle is demarcated by an inner periphery tilting at least near the upper surface toward the inside of a region surrounded by the opening, and also demarcated by an outer periphery having a surface parallel to the inner periphery and also having an edge surface adjacent to the upper surface and not parallel to the upper surface. Further, the nozzle is constructed so as to form, between the region and the lower surface of the object, a space in which the fluid has uniform pressure. The fluid supply device pressurizes the fluid and supplies the pressurized fluid to the nozzle. The transportation device transports the object.</p>
申请公布号 KR20100018613(A) 申请公布日期 2010.02.17
申请号 KR20107000547 申请日期 2008.05.09
申请人 IHI CORPORATION 发明人 HIRATA KENSUKE;TANAKA KAI
分类号 B65G49/06;B65G51/03;B65G54/00;H01L21/677 主分类号 B65G49/06
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