MANUFACTURING METHOD OF PROTECTION DEVICES FOR ESD PREVENTION AND THE PROTECTION DEVICES

摘要

PURPOSE: A manufacturing method of a protection device for ESD prevention and a protection device thereof are provided to include the fast reaction characteristic due to the high moment pulse tolerable amount and the electrostatic capacity by forming a variable voltage type resistance layer as the insulation inorganic material including a metal ball. CONSTITUTION: A top of an insulator substrate(100) is formed with the metallic inorganic matter mixed layer in which metal and insulation inorganic material are mixed. A voltage variable type resistant layer(300) is formed as the metallic inorganic matter mixed layer is divided into the metallic phase and an insulation inorganic material phase(301) by annealing. An inner electrode(400) is formed on the upper part of the voltage variable type resistant layer. A protective layer(500) is formed on the voltage variable type resistant layer and inner electrode. An outer electrode(600) is formed on both sides of the substrate.