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发明名称
摘要
申请公布号	JP4418542(B2)	申请公布日期	2010.02.17
申请号	JP19980228215	申请日期	1998.08.12
申请人		发明人
分类号	H01L21/331;H01L21/8222;H01L27/06;H01L29/73;H01L29/732	主分类号	H01L21/331
代理机构		代理人
主权项
地址

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