| 摘要 |
An optical apparatus comprises a plurality of multilayer-film reflective mirror that are capable of reflecting an electromagnetic wave in an extreme ultraviolet region. The multilayer-film reflective mirrors are arranged along an optical axis of the electromagnetic wave, and at least two of the multilayer-film reflective mirrors have reflecting wavelength characteristics being different from each other, in a wavelength region other than the extreme ultraviolet region. Another embodiment comprises a multilayer-film reflective mirror comprising an absorbing layer that absorbs an electromagnetic wave in at least a part of a wavelength region other than the extreme ultraviolet region.
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