| 摘要 |
There is disclosed a radiation sensitive composition containing a silane compound represented by the following formula (1): (R<1>)pSi(X)4-p wherein R<1> is an unhydrolyzable organic group having 1 to 12 carbon atoms, X is a hydrolyzable group, and p is an integer of 0 to 3, a hydrolyzate thereof and a condensate of the hydrolyzate; and a compound which generates an acid or base upon exposure to radiation. The composition is used to form an insulating film for an organic EL display device, and an interlayer insulating film for a liquid crystal display device. |
