MANUFACTURING METHOD OF CERAMIC PROBE CARD

摘要

PURPOSE: A manufacturing method of ceramic probe card is provided to improve the reliability of a probe pin structure by using a photosensitive ceramic sheet which has a little thermal expansion coefficient with a ceramic laminated body on the ceramic laminated body. CONSTITUTION: A photosensitive ceramic sheet(21) is formed on a ceramic laminated body(11). A first photosensitive ceramic sheet is selectively removed so that a space corresponding to a junction(21a) can be formed. The metal material is charged in the removed area of the first photosensitive ceramic sheet and junction is formed. A second photosensitive ceramic sheet(22) is formed on the first photosensitive ceramic sheet. The second photosensitive ceramic sheet is selectively removed so that a space corresponding to a probe beam(22a) can be formed. The metal material is charged in the removed area of the second photosensitive ceramic sheet and the Probe beam is formed. A third photosensitive ceramic sheet(23) is formed on the second photosensitive ceramic sheet.