METHOD AND DEVICE FOR PREPARING A MULTILAYERED COATING ON A SUBSTRATE

摘要

The invention relates to a method for preparing a substrate including a solid support and several layers on said support: a layer made of a film of metal oxide(s) particles; a layer made of a film of one or more metal(s) or dispersed particles of one or more metal(s). The method comprises the following steps: a) impregnating the solid heated support with a solution of precursors of the metal oxide(s) in a supercritical fluid and depositing a homogeneous and continuous film of metal oxide(s) particles or metal oxide(s) particles homogeneously dispersed on the support on the underlying layer; b) depositing a continuous or discontinuous film of one or more metals or dispersed particles of one or more metals on the support or on an underlying layer by chemical vapour deposition (CVD) from one or more precursors; wherein the steps a) and b) are carried out in the same chamber and reactor.