发明名称 Method for producing magnetic recording medium
摘要 A method for producing a magnetic recording medium, includes: forming an SOG film on a surface of a magnetic layer; forming a concavo-convex structure in the SOG film comprising one selected from a group consisting of silica glass, alkylsiloxane polymer, methyl silsesquioxane polymer, hydrogen silsesquioxane polymer and hydro alkylsiloxane polymer; etching the SOG film to expose the surface of the magnetic layer; etching the exposed surface of the magnetic layer by ion milling; and forming a filling layer on the surface of the magnetic layer while leaving a portion of the magnetic layer having been subjected to the ion milling.
申请公布号 US7662264(B2) 申请公布日期 2010.02.16
申请号 US20060406502 申请日期 2006.04.19
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SHIROTORI SATOSHI;KAMATA YOSHIYUKI;SAKURAI MASATOSHI
分类号 C23C14/34 主分类号 C23C14/34
代理机构 代理人
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