| 摘要 |
It is an object of the present invention to realize sure electrical connection between a contactor and an object to be inspected without influenced by heat, a reduction in the pre-heating time, and an enhanced throughput. A probe card of the present invention includes a contactor, a printed wiring board, an interposer provided between the contactor and the printed wiring board to have the both in elastic and electrical contact with each other, a coupling member integrating these, and a reinforcing member reinforcing the printed wiring board integrated via the coupling member.
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