发明名称 Seal ring corner design
摘要 Techniques for an integrated circuit device are provided. The integrated circuit device includes a substrate, an active circuit area, and a dielectric layer. A seal ring surrounds the active circuit area. At least one corner area of the integrated circuit includes a plurality of corner band stacks. Each of the plurality of corner band stacks is oriented at about a predetermined angle and extends from a first sawing trace to a second sawing trace. In a specific embodiment, if a structural fault in the at least one corner area occurs, the structural fault is predisposed to extend at about the predetermined angle.
申请公布号 US7663159(B2) 申请公布日期 2010.02.16
申请号 US20050245339 申请日期 2005.10.05
申请人 SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION 发明人 NING XIAN J.
分类号 H01L29/74 主分类号 H01L29/74
代理机构 代理人
主权项
地址