| 摘要 |
PURPOSE: A workbench is provided to save a space for a manufacturing device or an inspection device without interrupting down flow. CONSTITUTION: A workbench(1) comprises a ceiling plate part(2), a ceiling plate rotating part, and ceiling plate moving units(10,11). The ceiling plate part is arranged to cross a substrate loading plate. The ceiling plate rotating part rotates the ceiling plate part. The ceiling plate moving units are formed in both sides of the ceiling plate part, and move the ceiling plate part along a substrate loading surface of the substrate loading plate.
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