发明名称 Lanthanide dielectric with controlled interfaces
摘要 Methods and devices for a dielectric are provided. One method embodiment includes forming a passivation layer on a substrate, wherein the passivation layer contains a composition of silicon, oxygen, and nitrogen. The method also includes forming a lanthanide dielectric film on the passivation layer, and forming an encapsulation layer on the lanthanide dielectric film.
申请公布号 US7662693(B2) 申请公布日期 2010.02.16
申请号 US20070904182 申请日期 2007.09.26
申请人 MICRON TECHNOLOGY, INC. 发明人 BHATTACHARYYA ARUP
分类号 H01L21/20;H01L31/119 主分类号 H01L21/20
代理机构 代理人
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