摘要 |
A driving mechanism drives a phase difference sensor including a pair of photodetectors arranged in line in a direction (sensor arrangement direction) perpendicular to the direction of arrangement of the photodetectors. The distance to a target object is measured in the sensor arrangement direction while the phase difference sensor is set in a given position. The distance to the target object is measured in a direction perpendicular to the sensor arrangement direction by moving the phase difference sensor through the driving mechanism.
|