| 摘要 |
PURPOSE: A stocker apparatus is provided to reduce the generation of particles by preventing the surface abrasion which may occur at the interface of the cassette bush and the cassette support unit when loading a cassette on the fork. CONSTITUTION: A fork(20) supports a cassette, in which a plurality of substrates are accommodated, from underside and handles the cassette to be loaded or unloaded in a cassette stacker. A cassette support unit(30) is provided on the top of the fork to support the cassette and comprises a rolling ball for position setting. At least a part of the rolling ball is inserted in a groove formed on the lower side of the cassette in order to set the relative position of the fork.
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