VORRICHTUNG ZUM BEHANDELN VON SUBSTRATEN,申请号AT20060015409T-传众专利搜索

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发明名称	VORRICHTUNG ZUM BEHANDELN VON SUBSTRATEN
摘要
申请公布号	AT456686(T)	申请公布日期	2010.02.15
申请号	AT20060015409T	申请日期	2006.07.25
申请人	LEYBOLD OPTICS GMBH	发明人	FUKAREK, WOLFGANG;HAUSWALD, RALF;WILLKOMMEN, UDO
分类号	C23C14/00	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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