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发明名称
VERFAHREN ZUR HERSTELLUNG EINER DÜNNFILMTRANSISTORSTRUKTUR
摘要
申请公布号
AT456863(T)
申请公布日期
2010.02.15
申请号
AT20010273779T
申请日期
2001.12.18
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
SUZUKI, HIROSHI;SUEOKA, KUNIAKI
分类号
H01L29/786;G02F1/1368;G09F9/30;H01L21/3205;H01L21/336;H01L29/49
主分类号
H01L29/786
代理机构
代理人
主权项
地址
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