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发明名称
PIEZOAKUSTISCHER DÜNNFILMRESONATOR MIT KRISTALLINER ZINKOXIDSCHICHT
摘要
申请公布号
AT456041(T)
申请公布日期
2010.02.15
申请号
AT20050773871T
申请日期
2005.08.02
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
GABL, REINHARD;LINK, MATHIAS;SCHREITER, MATTHIAS
分类号
G01N27/00;C23C14/08
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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