| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an AlN substrate for improving the yield of an AlN substrate with an off-angle on the surface controlled, and to provide an AlN substrate. SOLUTION: The method for manufacturing an AlN substrate 10 includes the following steps. First, an AlN crystal is grown. From the AlN crystal, the AlN substrate 10 containing a surface 11 having a first region 12 and a second region 13 surrounding the first region 12 is cut out. In the cutting step, the AlN substrate 10 is cut out in such a manner that an off angle made by an axis orthogonal to the surface 11 and the C-axis is minimum at a first point 13a of the second region 13. COPYRIGHT: (C)2010,JPO&INPIT
|
