| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection technology, capable of determining a defect with high sensitivity up to the most peripheral part of a memory mat part of a semiconductor device or up to a peripheral circuit that has no repeatability. SOLUTION: The device includes an image detection part for acquiring an image of a circuit pattern, constituted of a plurality of dies having a repeated pattern; a defect determining part for synthesizing a reference image, by switching an addition object corresponding to a domain of the repeated pattern and other regions relative to the acquired detection image, comparing it with a detection image, and detecting defects; and a display device for displaying an image of the detected defect. COPYRIGHT: (C)2010,JPO&INPIT |
