| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for CNT synthesis which can easily manufacture CNT perpendicularly oriented to high density and having a uniform diameter, and to provide CNT and a manufacturing method thereof. SOLUTION: The manufacturing method of a substrate for CNT synthesis is characterized by providing with A step for depositing a catalyst on a substrate on the surface of which a plurality of recesses are formed by using a physically depositing method from a designated diagonal direction against the surface, and with B step for removing or inactivating the catalyst deposited on the part other than the recesses among the surface. COPYRIGHT: (C)2010,JPO&INPIT
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