| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid ejecting head excellent in aging characteristic. SOLUTION: The manufacturing method for the liquid ejecting head includes the process of preparing a pressure chamber substrate 52 in which a pressure chamber 521 is formed, the process of forming a diaphragm on one side of the pressure chamber substrate 52, the process of forming a piezoelectric element 54 above the diaphragm and at a position corresponding to a region where the pressure chamber is formed, the process of forming the pressure chamber 521 in the pressure chamber substrate 52, and the process of forming a nozzle plate with a nozzle hole which communicates with the pressure chamber on the other side of the pressure chamber substrate. The process of forming the piezoelectric element 54 includes the process of forming a lower electrode 4 above the diaphragm, the process of forming an orientation layer 7 above the lower electrode, the process of forming a piezoelectric layer 5 above the orientation layer, and the process of forming an upper electrode 6 above the piezoelectric layer. The orientation layer 7 is formed by sputtering using a target which includes a lanthanum oxide, a nickel oxide and a silicon compound. COPYRIGHT: (C)2010,JPO&INPIT
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