DEFECT REVIEW DEVICE, DEFECT REVIEW METHOD, AND DEFECT REVIEW EXECUTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a defect review device specifying a defect and a defect coordinate 33.

SOLUTION: This device has: a distance inspection image generation part 5 for generating based on an inspection image 28, a distance inspection image 29 wherein each distance value between pixels forming a contour of an actual pattern 28a and each pixel aligned in the normal direction of the contour is set relative to each pixel; a distance design image generation part 6 for generating a distance design image 27 wherein each distance value between pixels forming a contour of a design pattern 26a corresponding to the actual pattern 28a and each pixel aligned in the normal direction of the contour is set relative to each pixel; a distance difference image generation part 9 for generating a distance difference image 30 wherein a difference between each distance value of the distance design image 27 and the distance inspection image 29 is set relative to each pixel; and a defect coordinate specification part 10 for specifying the defect coordinate 33 where a defect 28b is generated based on the distance difference image 30.

COPYRIGHT: (C)2010,JPO&INPIT