| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dielectric structure capable of reducing pressure loss of a treatment fluid, and capable of efficiently removing particulate impurity in the treatment fluid. <P>SOLUTION: The dielectric structure 1 has a dielectric having at least one pierced hole 3 between a first surface S1 and a second surface S2, a first dielectric 4 provided between the first surface S1 and the second surface S2 in the dielectric and having at least one part positioned along an inner circumference face of the pierced hole 3, and a second dielectric 6 provided on the second surface S2 and having an outer rim part positioned on the second surface S2 and at least one part positioned along an opening of the pierced hole 3. <P>COPYRIGHT: (C)2010,JPO&INPIT |
