| 摘要 |
PROBLEM TO BE SOLVED: To provide a pod which suppresses diffusion of extremely fine dust or the like attached on a lid of the pod to a mini-environment, and to provide an FIMS system corresponding to the pod. SOLUTION: The sealed container includes an engaged part arranged in a cover outer circumferential surface of the pod 1, and incorporates an engagement system 5 which is arranged on a flange part around an opening of the pod and can engage with the engaged part. The engagement system can be operated from a front of the flange part. When the engagement system is in a non operation state, the engagement system is engaged with the engaged part, and acts biasing force for facilitating adhesion to the pod body on the cover. COPYRIGHT: (C)2010,JPO&INPIT |
