摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic recording medium which suppresses formation of a damaged layer on a surface of a magnetic recording layer and which reduces magnetic spacing and realizes higher recording density. Ž<P>SOLUTION: The method for manufacturing a magnetic recording medium includes forming a hard mask and a resist on the magnetic recording layer, imprinting a stamper to the resist to transfer a concave and convex pattern, removing residues remaining in a concave part of the patterned resist, etching the hard mask using the patterned resist as a mask to transfer the concave and convex pattern, stripping the resist, removing the remaining hard mask by ion beam etching and improving quality of the surface of the magnetic recording layer not covered by the remaining hard mask. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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