| 摘要 |
<p>PURPOSE: A chemical liquid supply system is provided to miniaturize the device by combing a backflow prevention valve in the pump housing. CONSTITUTION: A pump housing(11) has a liquid inlet(19a) and a liquid outlet(19b). A flexible tube is combined inside a pump housing and defines a pump room and a drive chamber. The driving unit(30) is installed in the pump housing. The driving unit expands and contracts the pump room through an incompressibility indirect medium(29). External sealing materials(42a, 42b) are arranged in the fitting hole locating in the inner surface of the pump housing. The fitting hole is correspond to the end parts which is a straight hole and a taper hole. The fastening housing(24a, 24b) is arranged inside end part of the flexible tube(14).</p> |
