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摘要
申请公布号
JP2010504644(A)
申请公布日期
2010.02.12
申请号
JP20090529310
申请日期
2007.09.13
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发明人
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/8247
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