| 摘要 |
PROBLEM TO BE SOLVED: To reduce the effect on cutting performance from reduction of a wire diameter caused by the wear during cutting in regard to the structure of a groove roller disposed in a wire saw cutting device that slices an ingot. SOLUTION: In the structure of the groove roller 21 which is disposed in the wire saw cutting device that revolves a wire spirally wound around a plurality of groove rollers having a number of grooves being disposed in parallel so as to sandwich the ingot, and slices the ingot while supplying slurry to the reciprocating wire. Corresponding to a decrement of the wire diameter worn during slicing of the ingot, an arrangement pitch of the grooves 22 of the groove roller is made smaller as it goes to the downstream side and the depth of the grooves 22 is made smaller as it goes to the downstream side. COPYRIGHT: (C)2010,JPO&INPIT |
