| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem of a conventional glass inspecting device wherein a glass substrate is inspected by manual visual observation using a microscope, a defective glass substrate is marked with oily ink or the like so that discrimination is allowed in a later process, but the marking with the oily ink can disappear during cleaning and the marking must be discriminated also in the next process. SOLUTION: The glass substrate is measured with an outline inspecting camera for each chip, a determination section determines the goodness/badness, the positions of good and bad chips are converted into mapping data by an arithmetic section, and it is recorded on a recording medium of a recording section. Thus, the goodness/badness of the glass substrate can be automatically discriminated in the next process by transmitting the mapping data recorded on the recording medium, and the working efficiency is improved. COPYRIGHT: (C)2010,JPO&INPIT
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