| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of transporting a dust-free case for wafer movement, and to provide a system thereof. Ž<P>SOLUTION: A detection system detects whether or not any overhead platform includes a dust-free case for wafer movement and generates a plurality of first signals to transmit them to a monitoring system. The monitoring system reads the first signals and instructs one of transportation systems to move the dust-free case for wafer movement onto an empty overhead platform. The detection system detects again whether or not any overhead platform includes a dust-free case for wafer movement and generates a plurality of second signals to transmit them to the monitoring system. The monitoring system reads the second signals and instructs another transportation system to move the dust-free case for wafer movement away from the overhead platform, to enhance the transportation speed of the case for wafer movement relatively easily and lower the manufacturing cost. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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