发明名称 QUARTZ GLASS CRUCIBLE FOR SILICON SINGLE CRYSTAL PULLING OPERATION AND PROCESS FOR MANUFACTURING THE SAME
摘要 <p>A quartz glass crucible for silicon single crystal pulling operation that by a simple arrangement, attains prevention of any collapse onto the inside at a superior edge of straight trunk part; and a process for manufacturing the same. The quartz glass crucible for silicon single crystal pulling operation having a straight trunk part and a bottom part, is characterized in that at least the straight trunk part is provided with a gradient of fictive temperature so that the fictive temperature on the outermost side thereof is 25°C or more lower than the fictive temperature on the innermost side thereof.</p>
申请公布号 KR20100016435(A) 申请公布日期 2010.02.12
申请号 KR20097023513 申请日期 2008.05.23
申请人 SHIN-ETSU QUARTZ PRODUCTS CO., LTD.;HERAEUS QUARZGLAS GMBH & CO. KG 发明人 OHAMA YASUO
分类号 C30B15/10;C03B20/00;C30B29/06;H01L21/02 主分类号 C30B15/10
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