发明名称 |
QUARTZ GLASS CRUCIBLE FOR SILICON SINGLE CRYSTAL PULLING OPERATION AND PROCESS FOR MANUFACTURING THE SAME |
摘要 |
<p>A quartz glass crucible for silicon single crystal pulling operation that by a simple arrangement, attains prevention of any collapse onto the inside at a superior edge of straight trunk part; and a process for manufacturing the same. The quartz glass crucible for silicon single crystal pulling operation having a straight trunk part and a bottom part, is characterized in that at least the straight trunk part is provided with a gradient of fictive temperature so that the fictive temperature on the outermost side thereof is 25°C or more lower than the fictive temperature on the innermost side thereof.</p> |
申请公布号 |
KR20100016435(A) |
申请公布日期 |
2010.02.12 |
申请号 |
KR20097023513 |
申请日期 |
2008.05.23 |
申请人 |
SHIN-ETSU QUARTZ PRODUCTS CO., LTD.;HERAEUS QUARZGLAS GMBH & CO. KG |
发明人 |
OHAMA YASUO |
分类号 |
C30B15/10;C03B20/00;C30B29/06;H01L21/02 |
主分类号 |
C30B15/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|