| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation detecting device capable of reducing unevenness in images in case of inplane distribution of film thickness in an interlayer dielectric and obtaining an excellent image. SOLUTION: A plurality of pixels having an optoelectric converter 2, a switching element 3, an Sig line, a Vg line, and the interlayer dielectric 16 disposed in between the optoelectric converter and the switching element are arranged on an insulating substrate 10 in a matrix configuration on an insulating substrate. At this point, a pixel pitch is denoted as P, a total of overlapped capacity of the Sig line and the Vg line per one pixel as Ca, the overlapped area of the Sig line and the optoelectric converter per one pixel as S, the film width of the interlayer dielectric as d, a specific permittivity asε, and a vacuum permittivity asε<SB>0</SB>. Then, such relationships are set to be satisfied as: Ca≥ε<SB>0</SB>×ε×S/d and 7d≤P/2. COPYRIGHT: (C)2010,JPO&INPIT |
