| 摘要 |
<P>PROBLEM TO BE SOLVED: To acquire high-frequency characteristics, regarding a capacitance-type acceleration sensor, and to provide a capacitance-type accelerometer that uses the sensor. Ž<P>SOLUTION: The acceleration sensor includes a fixed substrate 41 on which a fixed electrode 43 is formed, a frame body 31 loaded and fixed on the fixed substrate 41; a movable body 33 supported on the frame body 31 via a support beam 32 and displaced in a parallel direction to a plate surface of the fixed substrate 41, corresponding to an input acceleration; and a movable electrode 34 formed on the movable body 33. The fixed electrode 43 is divided into a plurality of portions in the displacement direction by through-holes 46 which are arrayed and formed on the fixed substrate 41, and the movable electrode 34 is divided into a plurality of portions, in a displacement direction by through-holes 35 which are arrayed and formed on the movable body 33. Each divided electrode 43a of the fixed electrode 43 and each divided electrode 34a of the movable electrode 34 are positioned shifted in the displacement direction. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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