发明名称 CONNECTION COMPONENT FOR AIR DRIVING DEVICE OPENING/CLOSING VALVE BODY
摘要 <P>PROBLEM TO BE SOLVED: To provide a miniaturized connection component feeding pressurized air and electricity to an air driving device for opening and closing a valve body by the pressurized air. Ž<P>SOLUTION: The connection component 600 used for an air driving device 300 includes: an intermediate joint 605 wherein a space having a plurality of outlets to one inlet is formed by being branched at the inside; a first joint 610 fitted to the inlet (in) of the intermediate joint 605 and communicated with the air driving device 300; a second joint 615 fitted to the first outlet (out1) among the plurality of outlets (out) in the intermediate joint 605 and forming an air feed passage Pa feeding pressurized air to the air driving device 300 via the intermediate joint 605 and the first joint 610; and a third joint 620 fitted to the second outlet (out2) in the intermediate 605 and passing through a heater wire which has been wired utilizing at least a part of the air feed path Pa while retaining the air-tightness of the air feed path Pa. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010031325(A) 申请公布日期 2010.02.12
申请号 JP20080195320 申请日期 2008.07.29
申请人 TOKYO ELECTRON LTD 发明人 ONO YUJI;KANEKO HIROYOSHI
分类号 C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/24
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